Semiconductor device, method of manufacturing thereof, circuit board and electronic apparatus

ABSTRACT

A semiconductor device is provided comprising: a semiconductor element including a plurality of electrodes; first wirings coupled to the electrodes and directed toward a center of the semiconductor element from a portion coupled to the electrodes; second wirings coupled between the first wirings and external terminals, the second wirings being directed to an outer area of the semiconductor element relative to the center; and at least one resin layer formed between the first wirings and the second wirings.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a divisional application of U.S. Ser. No. 11/016,504 filed Dec.17, 2004, which claims priority to Japanese Patent Application No.2003-419-406 filed Dec. 17, 2003 all of which are hereby expresslyincorporated by reference herein in their entirety.

BACKGROUND

1. Technical Field

The present invention relates a semiconductor device, a method ofmanufacturing, a circuit substrate and an electronic apparatus. Inparticular, the invention relates to a semiconductor device and a methodof manufacturing there same having highly reliable connections, acircuit substrate and an electronic apparatus in which the semiconductordevice is installed.

2. Related Art

To mount a semiconductor device with high density, it is preferable tomount a semiconductor chip as it is without packaging such as bare chipmounting. In bare chip mounting, however, insufficient protection isprovided for a semiconductor chip and it is hard to handle. Hence, asemiconductor device using a chip size package (CSP) is proposed and awafer level CSP in which a diced wafer becomes a semiconductor devicewithout modification has been recently developed. In this wafer levelCSP, resin layers and wirings are formed on a surface of a silicon waferin which tiny transistors are fabricated. This silicon wafer is cut intoindividual semiconductor devices so as to yield a semiconductor device.

In the conventional method of manufacturing a semiconductor device usinga wafer level CSP, when a resin layer is formed on a surface of asilicon wafer, the resin layer is not formed in a portion which is diced(i.e., cut) so as to avoid the loosening of a resin layer and thecracking of an end area of a semiconductor device (see InternationalPatent Publication No. 01-071805 pamphlet (FIG. 1 and FIG. 14)).

In the conventional method of manufacturing a semiconductor device usinga wafer level CSP, however, a resin layer and an external terminal areformed close to the center of a semiconductor element and the externalterminal is connected to wiring extending from an electrode formed in acircumferential part of the semiconductor device. In this case, there isa problem in that a portion of the wiring connected to the externalterminal is easily disconnected by stress and the like applied to thesemiconductor device if the wiring extends in the center direction of asemiconductor element from the electrode and is directly connected tothe external terminal. In particular, in the case of wafer level CSP, aportion for forming the external terminal of a wiring (called a land) islarge and the root of this land may become disconnected.

Further, in the conventional method of manufacturing a semiconductordevice using a wafer level CSP, there is another problem in that theroot of the land formed in the circumferential part of a semiconductordevice is easily disconnected due to the large stress at the areasremote from the center of the semiconductor device if the chip size islarge. In the conventional method of manufacturing a semiconductordevice, there is a further problem in that a wiring extends from thesurface of a semiconductor device in which electrodes are formed to thesurface of a resin layer so as to form a step in the wiring which makesit difficult to provide fine wiring.

The present invention aims to provide a semiconductor device, which cancorrespond to a large size chip and be provided with many externalterminals with fine wirings with highly reliable connections. Further,the invention aims to provide a method of manufacturing thesemiconductor device, and a circuit substrate and an electronicapparatus in which the semiconductor device with highly reliableconnections is installed.

SUMMARY

A semiconductor device of the present invention comprises: asemiconductor element including a plurality of electrodes; first wiringscoupled to the electrodes and directed toward a center of thesemiconductor element from a portion coupled to the electrodes; secondwirings coupled between the first wirings and external terminals, thesecond wirings being directed toward an outer area of the semiconductorelement relative to the center; and at least one resin layer formedbetween the first and second wirings. As such, stress is effectivelyrelaxed since a longitudinal section of the wiring is a U-shape.Further, parts connecting the wirings to the external terminals areplaced in the center of the semiconductor device so that disconnectionof the part connecting the wirings to the external terminals can beavoided even if stress is applied to the semiconductor device. Further,the at least one resin layer is formed between the first wirings and thesecond wirings so as to relax a stress applied to the wirings and copewith the large stress associated with a large size chip. Further, thefirst wirings are not formed on a resin layer and therefore no step isformed which enables fine wiring and many external terminals to beformed.

In the semiconductor device of the present invention, the semiconductordevice is packaged with a chip size packaging method. As suchdisconnection of the wirings is effectively avoided.

In the semiconductor device of the present invention, the externalterminals may be made of solder balls. A portion of the wirings (calleda land) for forming the external terminals is large and the root of thisland is prone to disconnection. However, the aforementioned structure ofthe wirings can prevent the root of the land from disconnecting.

In the semiconductor device of the present invention, a bore hole isinstalled in the at least of one resin layer so as to connect the firstand second wirings. This improves the reliability of the connection.

In the semiconductor device of the present invention, the semiconductordevice is manufactured by cutting integrated semiconductor elements madeon a silicon wafer by dicing. Thus, the semiconductor device ismanufactured by cutting a silicon wafer in which tiny transistors andthe like are formed, for example, with dicing so that many semiconductordevices are obtained from a single silicon wafer.

In the semiconductor device of the present invention, the at least oneresin layer is spaced apart from a portion of the silicon wafer to becut during dicing. This avoids cracking of an end area of asemiconductor device and the loosening of the resin layer.

In the semiconductor device of the present invention, the at least oneresin layer is formed in a region in which the electrodes are formed.The resin layer formed between the first wirings and the second wiringsis also formed in a region in which the electrodes are formed, forexample, so that an area for forming external terminals can be expandedand many eternal terminals can be formed.

In a method of manufacturing a semiconductor device including asemiconductor element having a plurality of electrodes; a resin layer;wirings; and a plurality of external terminals connected to the wirings,the method comprises: forming first wirings directed to a center of thesemiconductor element from a portion coupled to the electrodes; formingat least one resin layer; and forming second wirings directed to anouter area of the semiconductor element relative to the center andcoupled between the first wirings and the external terminals. In thisway, a longitudinal section of the wirings is a U-shape to effectivelyrelax the stress. Further, a part connecting the wirings to the externalterminals is placed in the center of a semiconductor device so thatdisconnection of the part connecting the wirings to the externalterminals can be avoided even if stress is applied to the semiconductordevice. Further, the at least one resin layer is formed between thefirst wirings and the second wirings to relax stress applied to thewirings and cope with the large stress associated with a large sizechip.

Further, the first wirings are not formed on a resin layer and no stepis formed so as to enable fine wirings and many external terminals to beformed.

In the method of manufacturing a semiconductor device of the presentinvention, the semiconductor device is packaged with a chip sizepackaging method.

The above-described structure is applied to the wirings in thesemiconductor device packaged with a CSP method so as to effectivelyavoid disconnection of the wirings.

In the method of manufacturing a semiconductor device of the presentinvention, the external terminals may be made of solder balls.

In the method of manufacturing a semiconductor device of the presentinvention, the first and second wirings may be connected via a throughhole formed in the resin layer.

In the method of a semiconductor device of the present invention, thesemiconductor device may be cut from a silicon wager includingintegrated semiconductor elements.

In the method of a semiconductor device of the present invention, the atleast one resin layer is spaced apart from a portion of the siliconwafer to be cut.

This avoids cracking an end area of a semiconductor device and theloosening of a resin layer.

In the method of manufacturing a semiconductor device of the presentinvention, the at least one resin layer is formed in a region in whichthe electrodes are formed.

The resin layer formed between the first wirings and the second wiringsis also formed in a region in which the electrodes are formed forexample so that an area for forming external terminals can be expandedand many eternal terminals can be formed.

In a circuit board of the present invention, the above mentionedsemiconductor device is installed.

An electronic apparatus of the invention is provided with any of theabove semiconductor devices so as to attain highly reliable connections.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A-B are a plan view and a longitudinal sectional view a firstembodiment of the invention.

FIGS. 2A-B are a plan view and a longitudinal sectional view showing asemiconductor device in which the wiring having a structure of the firstembodiment 1 is not used.

FIGS. 3A-C are plan views of the process for manufacturing asemiconductor device of a second embodiment of the invention.

FIGS. 4D-F are plan views showing a continued process followed by FIG. 3for manufacturing a semiconductor device.

FIG. 5G is a plan view showing a continued process followed by FIG. 4for manufacturing a semiconductor device.

FIG. 6 is a perspective view schematically showing an example of acircuit board according to a third embodiment of the invention.

FIGS. 7A-B are examples of electronic apparatus according to a thirdembodiment of the invention.

DETAILED DESCRIPTION First Embodiment

FIG. 1 is an plan view and a longitudinal sectional view a firstembodiment of the invention. Here, FIG. 1A is an example of thesemiconductor device according to embodiment 1 and some parts areillustrated as being transparent.

The semiconductor device 1 of embodiment 1 mainly comprises a firstresin layer 3, wirings 4, a second resin layer 5, a third resin layer 6and external terminals 7 on one surface of a semiconductor element 2.

As shown in FIG. 1, the wirings 4 comprise first wirings 4 a and secondwirings 4 b. A resin layer 3 is formed between the first wirings 4 a andthe second wirings 4 b. A passivation film 8 made of a insulationmaterial and electrodes 9 is formed on one surface of the semiconductorelement 2 and the first wirings 4 a are formed on the surface of thepassivation film 8.

A plurality of the electrodes 9 and a plurality of the wirings 4 areelectrically connected to each other. Namely, each of the wirings 4 iselectrically coupled to an external terminal 7 which are thereforeelectrically coupled to the electrodes 9.

Here, in general, a second resin layer 5 is formed for protecting thewirings 4 and the external terminals 7. However, the second resin layer5 is not necessarily needed. Further, in embodiment 1, a third resinlayer 6 is formed for reinforcing the root of each external terminal 7.However, the third resin layer 6 is not necessarily needed.

In the semiconductor element 2, many tiny transistors and others areformed by preprocessing a silicon wafer. The first resin layer 3 and theexternal terminals 7 are formed on the silicon wafer and the siliconwafer is thereafter cut by dicing to form the semiconductor device 1.Thus, a diced part of the silicon wafer becomes the semiconductor devicewithout further modification. This is called wafer level CSP. Waferlevel CSP is a kind of a packaging method known as CSP but furtheradvances miniaturization as compared to conventional (i.e., non “waferlevel”) CSP. In embodiment 1, silicon (mainly mono crystalline) is usedas the semiconductor device 2. However, other semiconductor materialssuch as gallium arsenide and the like can be used.

The thin passivation film 8 and the electrodes 9 made of aluminum andthe like are formed on one surface of the semiconductor element 2 andthe first wirings 4 a and the first resin layer 3 are formed on thesurface of the passivation film 8. In embodiment 1, a plurality ofelectrodes 9 are placed along the circumference (i.e., thecircumferential region) of the semiconductor element 2 and the firstresin layer 3 is also formed on some of the electrodes 9. Thus, formingthe first resin layer 3 can expand a region for forming the externalterminals 7 and enables many external terminals 7 to be formed. Further,the first resin layer 3 is not formed all the way to the outercircumference of the semiconductor element 2. As the material for thefirst resin layer 3, at least polyimide resin, silicon denaturation ofpolyimide resin, epoxy resin, silicon denaturation of epoxy resin,phenolic resin, acrylic resin, benzocyclobutene (BCB) and polybenzoxazole (PBO) may be used.

As described above, the wirings 4 comprise the first wirings 4 a and thesecond wirings 4 b. The first wirings 4 a are formed on the surface ofthe passivation film 8 so as to be connected to the electrodes 9 on thesemiconductor element 2. The first wirings 4 a are formed for everyelectrode 9 and ends for connecting to the electrodes 9 is a first land(explained in a second embodiment of the present invention in detail).The first wirings 4 a are made of multi layers including a layer of atitanium and tungsten alloy and a layer of copper. As shown in FIG. 1A,the first wirings 4 a are formed to be directed toward the center 10 ofthe semiconductor element 2 from the portion connected to the electrodes9. The center 10 is easy to determine in the case of a quadrate shapedsemiconductor element 2 as shown in FIG. 1A. However, in the case of arectangular semiconductor element 2, the center 10 is located at aposition which divides a longitudinal direction and transverse directionsubstantially into a 50:50 ratio. In the case of other shapes, thecenter 10 is located at the gravitational center.

In embodiment 1, the first wirings 4 a are formed on the surface of thepassivation film 8. It is preferable that another resin film is formed,for example, between the first wirings 4 a and the semiconductor element2.

The second wirings 4 b are coupled to the first wirings 4 a via a secondbore hole 11. In embodiment 1, the second wirings 4 b are formed on thesurface of the first resin layer 3 and the first resin layer 3 is formedbetween the first wrings 4 a and the second wirings 4 b. However, it ispreferable that a plurality of resin layers be formed and anothermaterial is interposed between the first wirings 4 a and the secondwirings 4 b. The second wirings 4 b are connected to the externalterminals 7 and are directed toward the outboard area of thesemiconductor element 2 relative to the center 10. At an end of aportion of the wirings 4 b connected to the first wirings 4 a is asecond land (explained in a second embodiment in detail) for couplingthat portion to the external terminals 7.

In the first embodiment 1, the second wirings 4 b connected to theexternal terminals 7 that are formed close to the center 10 of thesemiconductor element 2, are not connected to the external terminals 7as they proceed to the outboard area from the center 10 of thesemiconductor element 2. Further, in embodiment 1, as shown in FIG. 1B,the second wirings 4 b are formed within the internal wall of the boreholes 11. However, the first wirings 4 a may be formed within theinternal wall of the bore holes 11.

FIG. 2 is a plan view and a longitudinal sectional view showing asemiconductor device in which wiring having the structure of the firstembodiment 1 is not used. Here, in FIG. 2A, some parts are madetransparent similar to FIG. 1A. FIG. 2B shows two external terminals 7which are located parallel to each other for convenience and the samereference numbers as in FIG. 1 are applied to the same portions in thisfigure.

In the semiconductor device 1 shown in FIG. 2, the wirings 4 comprise asingle portion instead of two portions such as the first wirings 4 a andthe second wirings 4 b. The wirings 4 are formed on the surface of thefirst resin layer 3 and extend toward the center 10 of the semiconductorelement 2 from the electrodes 9 and are connected to the externalterminals 7 as they proceed from the outboard region to the center 10.

A large stress is applied to the semiconductor device 1 shown in FIG. 1and FIG. 2 farther away from the center 10 due to warpage and the like.As shown in FIG. 2, the wirings 4 are connected to the externalterminals 7 directed to the center 10 of the semiconductor element 2from outside the external terminals 7 and the connecting portions 12 ofthe wirings 4 are placed far from the center 10 so as to receive a largestress. Hence, in the conventional semiconductor device 1 shown in FIG.2, there disconnections occur at the connecting portions 12. Further,the wirings 4 connected to the external terminals 7 located far from thecenter 10 have a short length so that part of the connecting portions 12is easily disconnected. In contrast, in the semiconductor device 1 ofembodiment 1 (see FIG. 1), the first wirings 4 a and the second wirings4 b are formed and the second wirings 4 b are connected to the externalterminals 7 as directed to the outer area from the center 10 of thesemiconductor element 2 so as to avoid disconnection of the connectingportions 12.

Here, the structure of the semiconductor device 1 according toembodiment 1 shown in FIG. 1 is reviewed. The second resin layer 5 isformed on the surface of the semiconductor element 2 including the firstwiring 4 a, the first resin layer 3 and the second wiring 4 b. Thesecond resin layer 5, however, is not formed all the way to the outercircumference of the semiconductor element 2 and a region (a second landexplained in embodiment 2 in detail) where the external terminals 7 ofthe second wirings 4 b are formed. The second resin layer 5 is notformed in the outer circumstantial region of the semiconductor element 2to avoid cracking an end area of the semiconductor device 1 andloosening of a resin layer by being spaced apart from the area to be cutduring dicing when the semiconductor element 2 is cut from a siliconwafer. As the material for the second resin layer 5, the same materialas for the first resin layer 3 may be used or a different material maybe used.

The external terminals 7 may be made of solder balls formed on thesecond lands 2 (explained in the second embodiment in detail) at the endof the second wirings 4 b. The external terminals 7 are used forconnecting the semiconductor device 1 to a circuit board and may be madeof a lead-free solder, for example.

Further, the third resin layer 6 may be formed on the surface of thesecond resin layer 5. The third resin layer 6 is formed mainly forreinforcing the external terminals 7 so that a circumferential area ofthe external terminals 7 is slightly sloped. Further, the third resinlayer 6 is formed to expose a part of each external terminal 7. Here, asthe material for the third resin layer 6, the same material as for thefirst resin layer 3 may be used or a different material may be used.

It is preferable that the elasticity of each of the first resin layer 3,the second resin layer 5 and the third resin layer 6 is lower in thisorder. Thus, resin layers having a lower elasticity are formed in orderfrom the semiconductor element 2 to the external terminals 7 toeffectively relax stress such as warpage.

In embodiment 1, a part of or all of the plurality of wirings 4 comprisethe first wirings 4 a directed to the center 10 of the semiconductorelement 2 from a portion coupled to the electrodes 9 and the secondwirings 4 b which are directed to an outer area from the center 10 ofthe semiconductor element 2 and coupled to the external terminals 7 soas to make the longitudinal cross section of the wirings 4 a U-shape forrelaxing a stress. Further, a part connecting the second wirings 4 b tothe external terminals 7 is placed in the center of the semiconductordevice 2 so that disconnection of the part connecting the second wirings4 b to the external terminals 7 can be avoided even if a stress isapplied to the semiconductor device 1. Further, the first resin layer 3is formed between the first wirings 4 a and the second wirings 4 b so asto relax stress applied to the wirings 4 and cope with large stressesassociated with a large size chip.

Further, the first wirings 4 a are not formed on a resin layer andtherefore no step is formed which enables fine wiring and many externalterminals 7 to be formed.

Second Embodiment

FIGS. 3, 4 and 5 are a partial plan view and partial longitudinal crosssection showing manufacturing process for a semiconductor device ofembodiment 2 of the invention.

Here, the manufacturing method shown in embodiment 2 is to manufacturethe semiconductor device 2 shown in embodiment 1. In FIGS. 3, 4 and 5,the second resin layer 5 and the third resin layer 6 are illustrated asbeing transparent similar to FIG. 1A. FIGS. 3, 4 and 5 show only a partcorresponding to the semiconductor device 1 which is one of a siliconwafer as an integration of the semiconductor element 1.

First, the passivation film 8 and the electrodes 9 are formed on asilicon wafer provided with many tiny transistors via pre-processing(FIG. 3A.) The passivation film 8 is formed in an area except a portionfor the electrodes 9 on a side surface of the semiconductor element 2.Electrodes 9 are formed along the outer circumference of thesemiconductor element 2.

Then, a plurality of the first wirings 4 a are coupled to the electrodes9 on the semiconductor element 2. The first wirings 4 a are formed asdirected to the center 10 of the semiconductor element 2 from a portionof connecting the first wirings 4 a to the electrodes 9. The ends of thefirst wirings 4 a include the first lands 14 which will be coupled tothe second wirings 4 b later. By making the first lands 14 relativelysmall, forming many external terminals 7 is possible so as to restraindisconnection of the roots of the first lands 14. The first wirings 4 aare formed by forming a titanium and tungsten alloy layer and a copperlayer on the surface of the passivation film 8 with sputtering forexample, thereafter coating a resist film with a predetermined shape(not shown), leaving the alloy layer and copper layer in the area forthe first wirings 4 a by etching, and then removing the resist layer.

Further, the first resin layer 3 is formed on the surface of thepassivation film 8 on which the wirings 4 a have been formed during theprocess of FIG. 3B (see FIG. 3C.). At this time, the first resin layer 3is also formed on a part of the first wirings 4 a and electrodes 9.Thus, forming the first resin layer 3 on a part of the electrodes 9 canexpand a region for forming the external terminals 7 and enables manyexternal terminals 7 to be formed. Bore holes 11 are formed in a part ofeach first land 14 of the resin layer 3 and the first wirings 4 a can becoupled to the electrodes 9 thereby.

Thereafter, the second wirings 4 b are formed on the surface of thefirst resin layer 3 (FIG. 4D). The second wirings 4 b are formed as tobe connected to the first wirings 4 a via the bore holes 11 and directedto the outer area from the center 10 of the semiconductor element 2. Thesecond wirings 4 b may be also formed by the same process as for thefirst wirings 4 a for example. However, it is preferable that copperplating be added over the titanium and tungsten alloy layer and thecopper layer.

The second resin layer 5 is formed on the surface of the first resinlayer 3 and the second wirings 4 b (FIG. 4E). At this time, the secondresin layer 5 is not formed all the way to the outer circumference ofthe semiconductor element 2 as described above and an end of the secondwirings 4 b on the side of the bore holes 11. The end of the secondwirings 4 b on the side of the bore holes 11 include the second lands 15in which the external terminals 7 will be formed. The second lands 15are preferably formed having a larger area than that of the first lands14.

Further, the external terminals 7 made of solder balls are formed in thesecond lands 15 (FIG. 4F). The external terminals 7 are made of leadfree solder, for example, and formed by solder ball transferring, pasteprinting and plating.

Further, the third resin layer 6 is formed on the surface of the secondresin layer 5 (FIG. 5G). In this case, the third resin layer 6 is formedto expose a part of the external terminals 7. However, the third resinlayer 6 is not necessarily need.

Finally, after completing the manufacturing processes shown in FIG. 4Fand through FIG. 5G, the silicon wafer is cut by dicing so as to form anindividual semiconductor device 1. In the above manufacturing processes,the first resin layer 3 and the second resin layer 5 are not formed inthe area in which a silicon wafer as an integration of the semiconductorelement 2 is diced so that these resin layers are not cut to avoidcracking the end of the semiconductor element 2 and removing these resinlayers.

In embodiment 2, a part of or all of the plurality of wirings 4 comprisethe first wirings 4 a directed to the center 10 of the semiconductorelement 2 from a portion coupled to the electrodes 9 and the secondwirings 4 b which are directed to an outer area from the center 10 ofthe semiconductor element 2 and coupled to the external terminals 7 soas to make the longitudinal cross section of the wiring 4 a U-shape forrelaxing stress. Further, a part connecting the second wirings 4 b tothe external terminals 7 is placed in the center of the semiconductordevice 2 so that disconnection of the part connecting the second wirings4 b to the external terminals 7 can be avoided even if stress is appliedto the semiconductor device 1. Further, the first resin layer 3 isformed between the first wirings 4 a and the second wirings 4 b so as torelax stress applied to the wirings 4 and cope with the large stressassociated with a large size chip.

Other advantages in the embodiment are the same as in the semiconductordevice according to the first embodiment.

Third Embodiment

FIG. 6 is a perspective view schematically showing an example of acircuit board according to a third embodiment of the invention. In thecircuit board 100 shown in FIG. 6, the semiconductor device according tothe first embodiment of the invention is mounted. The circuit board 100is made of a glass epoxy substrate and wiring patterns such as copperand others are formed in advance. The external terminals 7 of thesemiconductor device 1 are connected to the circuit board 100 so as tobe electrically conducted and perform a predetermined processing (dataprocessing for example).

FIG. 7 is an example of an electronic apparatus according to a thirdembodiment of the invention. The electronic apparatus shown in FIG. 7has the semiconductor device 1 according to the first embodiment of theinvention. FIG. 7A shows an example in which the semiconductor device 1is applied to a personal computer 200 and FIG. 7B is an example in whichthe semiconductor device 1 is applied to a cellar phone 300. Thesemiconductor device 1 shown in the first embodiment 1 and thesemiconductor device 1 shown the manufacturing method of the secondembodiment 2 can be applied to other electronic devices.

1. A semiconductor device comprising: a semiconductor element includinga plurality of electrodes; first wirings coupled to the electrodes anddirected toward a center of the semiconductor element from a portioncoupled to the electrodes; second wirings coupled between the firstwirings and external terminals, the second wirings being directed to anouter area of the semiconductor element relative to the center; and atleast one resin layer formed between the first wirings and the secondwirings.
 2. The semiconductor device according to claim 1, wherein thesemiconductor device is packaged with a chip size packaging method. 3.The semiconductor device according to claim 1, wherein the externalterminals comprise solder balls.
 4. The semiconductor device accordingto claim 1, wherein the first wirings and the second wirings areconnected via a bore hole in the at least one resin layer.
 5. Thesemiconductor device according to claim 1, wherein the semiconductordevice is cut from a silicon wafer by dicing.
 6. The semiconductordevice according to claim 5, wherein the at least one resin layer isspaced apart from a portion of the silicon wafer to be cut duringdicing.
 7. The semiconductor device according to claim 1, wherein the atleast one resin layer is formed in a region in which the electrodes areformed.
 8. A method of manufacturing a semiconductor device including asemiconductor element having a plurality of electrodes; a resin layer;wirings electrically coupled to the electrodes; and a plurality ofexternal terminals coupled to the wirings, the method comprising:forming first wirings directed toward a center of the semiconductorelement from a portion coupled to the electrodes; forming at least oneresin layer on the first wirings; and forming second wirings on the atleast one resin layer and coupled between the external terminals and thefirst wirings, the second wirings being directed to an outer area of thesemiconductor element relative to the center.
 9. The method ofmanufacturing a semiconductor device according to claim 8, wherein thesemiconductor device is packaged with a chip size packaging method. 10.The method of manufacturing a semiconductor device according to claim 8,wherein the external terminals comprise solder balls.
 11. The method ofmanufacturing a semiconductor device according to claim 8, wherein thefirst wirings and the second wirings are connected via a bore holeformed in the at least one resin layer.
 12. The method of manufacturinga semiconductor device according to claim 8, further comprising: cuttinga silicon wafer including integrated semiconductor elements by dicing.13. The method of manufacturing a semiconductor device according toclaim 12, wherein the at least of one resin layer is spaced apart from aportion of the silicon wager to be cut during dicing.
 14. The method ofmanufacturing a semiconductor device according to claim 8, wherein theat least of one resin layer is formed in a region in which theelectrodes are formed.
 15. A circuit substrate including thesemiconductor device according to claim
 1. 16. An electronic apparatusincluding the semiconductor device according to claim 1.